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공정별

최고의 품질로 수요자 여러분께 보답하겠습니다.

Semiconductor manufacturing

- Conductive metals
W WF6, W-amide
Al DMAH, devisco-DMAH(low viscosity), TMA
Cu Cu(hfac)2
Co CCTBA, Co(MeCp)2
TaN PDMAT, PDEAT, TBTDET
TiN TDMAT, TDEAT
ZrN TDMAZ, TDEAZ
Ta TaCl5
Ti TiCl4
Ni Ni(MeCp)2, Ni(EtCp)2, Ni(dmamb)2
Pt Me3Pt(MeCp)
Pd Pd(hfac)2
Ru Ru(EtCp)2, RuCHD
Ir Ir(acac)2
- Dieletric oxide
SiO2 TEOS, TDMASi, TDMASiH
Al2O3 TMA, TEA, TMA, DMEA
HfO2 TDMAH, TDEAH, Hf(OtBu)4
La2O3 La(tmhd)3
TiO2 Ti(OiPr)4, Ti(OtBu)4, TDMAT, TDEAT
ZrO2 Zr(OtBu)4, TDMAZ, TDEAZ
BST Ba(tmhd)2, Sr(tmhd)2, Ti(OiPr)2(tmhd)2
PZT Pb(tmhd)2, Zr(tmhd)4, Ti(OiPr)2(tmhd)2
PZT Sr(tmhd)2. BiPh3, BiMe3, Bi(tmhd)3, Ta(OEt)5
- Semiconductor
III-V TMG, TMI, TEG, TEI, TMAs, TEAs, TMSb, TESb, TMBi
II-VI DMZn, DEZn, DMCd, DMSe, DESe, SeiPr2, DMTe, DETe, TeiPr2, TetBu2

Organic ElectroLuminescence Display (OELD)

Alq3