home_제품소개_시스템사업부_LCD_SUSCEPTOR

SUSCEPTOR

최고의 품질로 수요자 여러분께 보답하겠습니다.

  • SUSCEPTOR D
  • SUSCEPTOR L1
  • SUSCEPTOR L3
  • SUSCEPTOR L4
  • SUSCEPTOR P3
  • SUSCEPTOR P4
  • IPS 5G Stage Heater
    (900*1600)
  • AKT 4.5G
    Susceptor
  • NLT CMD-450BHT
    Heater
  • ULVAC 4.5G CMD HEATER

SUSCEPTOR D

General Information
Equipment - Material Aluminum
Maker AKT Process Temp 350 ~ 430˚c
Treatment Bare Uniformity < 1.7%
Process CVD Leak rate < 1X10-8

SUSCEPTOR L1

General Information
Equipment - Material Aluminum
Maker AKT Process Temp 350 ~ 430˚c
Treatment Bare Uniformity < 1.7%
Process CVD Leak rate < 1X10-8

SUSCEPTOR L3

General Information
Equipment - Material Aluminum
Maker AKT Process Temp 350 ~ 470˚c
Treatment Bare Uniformity < 1.7%
Process CVD Leak rate < 1X10-8

SUSCEPTOR L4

General Information
Equipment - Material Aluminum
Maker AKT Process Temp 350 ~ 470˚c
Treatment Bare Uniformity < 2.2%
Process CVD Leak rate < 1X10-8

SUSCEPTOR P3

General Information
Equipment - Material Aluminum
Maker AKT Process Temp 350 ~ 430˚c
Treatment Bare Uniformity < 1.7%
Process CVD Leak rate < 1X10-8

SUSCEPTOR P4

General Information
Equipment - Material Aluminum
Maker AKT Process Temp 350 ~ 430˚c
Treatment Bare Uniformity < 2.2%
Process CVD Leak rate < 1X10-8

IPS 5G Stage Heater (900*1600)

General Information
Equipment - Material Aluminum
Maker IPS Process Temp 150 ~ 200˚c
Treatment GBB Uniformity < 2%
Process LPCVD Leak rate < 1X10-8

AKT 4.5G Susceptor

General Information
Equipment - Material Aluminum
Maker AKT Process Temp 350 ~ 430˚c
Treatment Anodizing Uniformity < 2%
Process LTPS Leak rate < 1X10-8

NLT CMD-450BHT Heater

General Information
Equipment CMD-450BHT Material Aluminum
Maker ULVAC Process Temp 360 ~ 470˚c
Treatment Anodizing Uniformity < 5.0%
Process CVD Leak rate < 1X10-8

ULVAC 4.5G CMD HEATER

General Information
Equipment CMD 950 Material Aluminum
Maker ULVAC Process Temp ~ 430˚c
Treatment Anodizing Uniformity < 2%
Process LTPS Leak rate < 1X10-8