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  • Gasonics 8¡±
  • Das ¥² 8¡±
  • Tera

Gasonics 8¡±

Gasonics 8¡± (TOP)
Gasonics 8¡± (BOTTOM)
General Information
Product PEP 3510 Material Aluminum
Maker MECARO Process Temp ~ 35¢ªc
Treatment Bare Uniformity <1%
Process ASHER Leak rate < 1X10-8

Das ¥² 8¡±

Das ¥² 8¡± (TOP)
Das ¥² 8¡± (BOTTOM)
General Information
Product DAS Material Aluminum
Maker MECARO Process Temp ~ 300¢ªc
Treatment Bare Uniformity <1%
Process ASHER Leak rate < 1X10-8

Tera

Tera (TOP)
Tera (BOTTOM)
General Information
Product DAS Material Aluminum
Maker MECARO Process Temp ~ 300¢ªc
Treatment Bare Uniformity <1%
Process ASHER Leak rate < 1X10-8