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HDP Side Coil
General Information
Product | HDP Side Coil | Material | Cu |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 135¢ªc |
Leak rate | - | Uniformity | |
Process | HDP-PROCESS | - |
Ground Shield ring
General Information
Product | ULTIMA | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 135¢ªc |
Leak rate | - | Uniformity | |
Process | HDP-PROCESS | - |
6Zone Heater
General Information
Product | Cyclone Plus | Material | Aluminum |
---|---|---|---|
Maker | MECARO | Process Temp | ~ 185¢ªc |
Treatment | Anodizing | Uniformity | > 1% |
Process | Cp-Zr | Leak rate | < 1X10-8 |
HEATING SHOWER HEAD
General Information
Product | - | Material | Aluminum |
---|---|---|---|
Maker | - | Process Temp | ~ 180¢ªc |
Treatment | Anodizing | Uniformity | < 1% |
Process | Oxide | Leak rate | < 1X10-8 |