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OTHER

최고의 품질로 수요자 여러분께 보답하겠습니다.

  • Ultima Side Coil
  • Ground Shield ring
  • 6Zone Heater
  • HEATING SHOWER HEAD

Ultima Side Coil

General Information
Equipment ULTIMA Material Cu
Maker AMAT Process Temp ~ 135˚c
Leak rate - Uniformity  
Process HDP-PROCESS -  

Ground Shield ring

General Information
Equipment ULTIMA Material Aluminum
Maker AMAT Process Temp ~ 135˚c
Leak rate - Uniformity  
Process HDP-PROCESS -  

6Zone Heater

General Information
Equipment Cyclone Plus Material Aluminum
Maker JEL Process Temp ~ 185˚c
Treatment Anodizing Uniformity > 1%
Process Cp-Zr Leak rate < 1X10-8

HEATING SHOWER HEAD

General Information
Equipment - Material Aluminum
Maker - Process Temp ~ 180˚c
Treatment Anodizing Uniformity < 1%
Process Oxide Leak rate < 1X10-8