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CVD

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  • Forged DxZ 6"
  • Forged DxZ 8"
  • Atto 8"
  • Atto 12"
  • CVD Heater 12" First
  • CVD Heater 12" Normal
  • CVD Heater 12" First
    AIF Coating Type
  • CVD Heater 12" Normal
    AIF Coating Type

Forged DxZ 6"

FORGED DxZ 6”(TOP)
FORGED DxZ 6”(BOTTOM)
General Information
Product Forged DxZ 6" Material Aluminum
Maker MECARO Process Temp ~ 485˚c
Treatment Anodizing, Bead blast Uniformity <1%
Process PE-TEOS,BPSG,PSG,USG Leak rate < 1X10-8

Forged DxZ 8"

FORGED DxZ 8”(TOP)
FORGED DxZ 8”(BOTTOM)
General Information
Product Forged DxZ 8" Material Aluminum
Maker MECARO Process Temp ~ 485˚c
Treatment Anodizing, Bead blast Uniformity <1%
Process PE-TEOS,BPSG,PSG,USG Leak rate < 1X10-8

Atto 8"

Atto 8" (TOP)
Atto 8" (BOTTOM)
General Information
Product ATTO Material Aluminum
Maker MECARO Process Temp ~ 470˚c
Treatment FCCC Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

Atto 12"

Atto 12" (TOP)
Atto 12" (BOTTOM)
General Information
Product ATTO Material Aluminum
Maker MECARO Process Temp ~ 470˚c
Treatment FCCC Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

CVD Heater 12" First

CVD Heater 12" First (TOP)
CVD Heater 12" First (BOTTOM)
General Information
Product CVD Heater 12" First Material Aluminum
Maker MECARO Process Temp ~ 470˚c
Treatment Bare Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

CVD Heater 12" Normal

CVD Heater 12" Normal (TOP)
CVD Heater 12" Normal (BOTTOM)
General Information
Product CVD Heater 12" Nomal Material Aluminum
Maker MECARO Process Temp ~ 470˚c
Treatment Bare Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

CVD Heater 12" First (AIF Coating Type)

CVD Heater 12" First (AIF Coating Type) (TOP)
CVD Heater 12" First (AIF Coating Type) (BOTTOM)
General Information
Product CVD Heater 12" First Material Aluminum
Maker MECARO Process Temp ~ 470˚c
Treatment AlF coating Uniformity <1%
Process PE-CVD Leak rate < 1X10-8

CVD Heater 12" Normal (AIF Coating Type)

CVD Heater 12" Normal (AIF Coating Type) (TOP)
CVD Heater 12" Normal (AIF Coating Type) (BOTTOM)
General Information
Product CVD Heater 12" Normal Material Aluminum
Maker MECARO Process Temp ~ 470˚c
Treatment AlF coating Uniformity <1%
Process PE-CVD Leak rate < 1X10-8